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Journal of Materials Chemistry

Volumn 12, Issue 2, 2002, Pages 165-167

Novel mononuclear zirconium and hafnium alkoxides; improved precursors for the MOCVD of ZrO2 and HfO2

(8) Williams, Paul A a Roberts, John L a Jones, Anthony C a,b Chalker, Paul R a Bickley, Jamie F a Steiner, Alexander a Davies, Hywel O b Leedham, Timothy J b

a UNIVERSITY OF LIVERPOOL (United Kingdom)

b Inorgtech Limited (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

HAFNIUM; ZIRCONIUM OXIDE;

ARTICLE; CHEMICAL STRUCTURE; FILM; OLIGOMERIZATION; TEMPERATURE DEPENDENCE; VAPOR;

EID: 0036161122 PISSN: 09599428 EISSN: None Source Type: Journal
DOI: 10.1039/b109994a Document Type: Article

Times cited : (53)

References (20)

1
- 0035872897
- (2001) J. Appl. Phys. , vol.89 , pp. 5243
- Wilk, G.D.¹ Wallace, R.M.² Anthony, J.M.³

2
- 0034180064
- (2000) Adv. Mater. Opt. Electron. , vol.10 , pp. 105
- Smith, R.C.¹ Ma, T.² Hoilien, N.³ Tsung, L.Y.⁴ Bevan, M.J.⁵ Colombo, L.⁶ Roberts, J.⁷ Campbell, S.A.⁸ Gladfelter, W.⁹

3
- 0000252825
- (1971) J. Electrochem. Soc. , vol.118 , pp. 747
- Tauber, R.N.¹ Dumbri, A.C.² Caffrey, R.E.³

4
- 0002122982
- eds. C. F. Powell, J. H. Oxley and J. M. Blocher, John Wiley & Sons, Inc., New York, and references therein
- (1966) Chemically Deposited Nonmetals , pp. 343-420
- Powell, C.F.¹

5
- 0000425320
- (1997) Electrochem. Soc. Proc. , vol.97 , Issue.25 , pp. 960
- Pulver, M.¹ Wahl, G.²

6
- 0031641544
- (1998) Mater. Res. Soc. Symp. Proc. , vol.495 , pp. 11
- Jones, A.C.¹ Leedham, T.J.² Wright, P.J.³ Crosbie, M.J.⁴ Williams, D.J.⁵ Lane, P.A.⁶ O'Brien, P.⁷

7
- 10444259815
- (2000) Chem. Vap. Deposit. , vol.6 , pp. 21
- Gallegos, J.J.¹ Ward, T.L.² Boyle, T.J.³ Rodriguez, M.A.⁴ Francisco, L.P.⁵

8
- 0004242252
- Academic Press, New York, and references therein
- (1978) Metal Alkoxides
- Bradley, D.C.¹ Mehrotra, R.C.² Gaur, D.P.³

9
- 0002122982
- eds. C. F. Powell, J. H. Oxley and J. M. Blocher, Wiley & Sons Inc., New York
- (1966) Chemically Deposited Nonmetals , pp. 343
- Powell, C.F.¹

10
- 33749099810
- (1999) J. Chem. Soc., Dalton Trans. , pp. 2853
- Fleeting, K.A.¹ O'Brien, P.² Jones, A.C.³ Otway, D.J.⁴ White, A.J.P.⁵ Williams, D.J.⁶

11
- 84988748741
- Paper Q-II.3, June 6-8 2001, Strasbourg, France, in press
- European MRS Conference
- Matero, R.¹ Ritala, M.² Leskala, M.³ Jones, A.C.⁴ Williams, P.A.⁵ Bickley, J.F.⁶ Steiner, A.⁷ Leedham, T.J.⁸ Davies, H.O.⁹

12
- 84989427484
- (1993) Chem. Ber. , vol.126 , pp. 1127
- Herrmann, W.A.¹ Huber, N.W.² Anwander, R.³ Priermeier, T.⁴

13
- 0001238554
- (2001) Chem. Vap. Deposit. , vol.7 , pp. 205
- Williams, P.A.¹ Jones, A.C.² Crosbie, M.J.³ Wright, P.J.⁴ Bickley, J.F.⁵ Steiner, A.⁶ Davies, H.O.⁷ Leedham, T.J.⁸ Critchlow, G.W.⁹

14
- 0000892443
- (1993) J. Am. Chem. Soc. , vol.115 , pp. 5093
- Samuels, J.A.¹ Lobkovsky, E.B.² Streib, W.E.³ Folting, K.⁴ Huffman, J.C.⁵ Zwanziger, J.W.⁶ Caulton, K.G.⁷

15
- 0030719459
- (1997) J. Am. Chem. Soc. , vol.119 , pp. 9745
- Terry, K.W.¹ Lugmair, C.G.² Tilley, T.D.³

16
- 0000261144
- (1999) Polyhedron , vol.18 , pp. 941
- Starikova, Z.A.¹ Turevskaya, E.P.² Kozlova, N.I.³ Turova, N.Ya.⁴ Berdyev, D.V.⁵ Yanovsky, A.I.⁶

17
- 0001135993
- (2000) J. Nucl. Mater. , vol.281 , pp. 171
- Simone, D.¹ Bechade, J.L.² Gosset, D.³ Chevarier, A.⁴ Daniel, P.⁵ Pilliaire, H.⁶ Baldinozzi, G.⁷

18
- 0031248563
- (1997) Mater. Res. Bull. , vol.32 , pp. 1367
- Kim, B.-K.¹ Hamaguchi, H.²

19
- 84975341279
- (1979) J. Electrochem. Soc. , vol.126 , pp. 1203
- Balog, M.¹ Schieber, M.² Michman, M.³ Patai, S.⁴

20
- 0034180064
- (2000) Adv. Mater. Opt. Electron. , vol.10 , pp. 105
- Smith, R.C.¹ Ma, T.² Hoilien, N.³ Tsung, L.Y.⁴ Bevan, M.J.⁵ Colombo, L.⁶ Roberts, J.⁷ Campbell, S.A.⁸ Gladfelter, W.⁹

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