Low-resistivity contacts to the surface of superconductor thin films

Superconductor Science and Technology

Volumn 15, Issue 1, 2002, Pages 29-31

  Harashima, E ^a   Khan, Nawazish A ^b   Sekita, Y ^c   Ishida, K ^c   Ihara, H ^c  

^a Furuchi Chemical Co Ltd   (Japan)

^b QUAID I AZAM UNIVERSITY   (Pakistan)

^c ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRIC CONTACTS; REACTIVE ION ETCHING; SPUTTER DEPOSITION; SURFACE PHENOMENA; THIN FILMS;

LOW-RESISTIVITY CONTACTS;

SUPERCONDUCTING FILMS;

EID: 0036146306     PISSN: 09532048     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-2048/15/1/306     Document Type: Article

References (6)