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Volumn 26, Issue 1, 2002, Pages 122-127
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Creating a low-cost, ultra-clean environment
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Author keywords
[No Author keywords available]
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Indexed keywords
CONTAMINATION;
QUALITY CONTROL;
STANDARDS;
CLEANROOM ENVIRONMENT;
CLEAN ROOMS;
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EID: 0036132858
PISSN: 01416359
EISSN: None
Source Type: Journal
DOI: 10.1016/S0141-6359(01)00093-9 Document Type: Article |
Times cited : (8)
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References (6)
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