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Volumn 20, Issue 1, 2002, Pages 382-385
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Physical understanding of moisture induced degradation of nanoporous aluminum oxide thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINA;
CAPACITANCE;
DEGRADATION;
DIELECTRIC PROPERTIES;
DIFFUSION IN SOLIDS;
MOISTURE;
POROUS MATERIALS;
POROUS ALUMINUM OXIDE THIN FILMS;
THIN FILMS;
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EID: 0036122681
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1430243 Document Type: Conference Paper |
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Times cited : (18)
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References (12)
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