Design, fabrication and characterization of an integrated micro heat pipe

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 85-88

  Lee, Man ^a   Wong, Man ^a   Zohar, Yitshak ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROMACHINING; MICROSENSORS; NITRIDES; PERMITTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; TEMPERATURE DISTRIBUTION;

GLASS WAFER; INTEGRATED MICROSYSTEM; MICRO HEAT PIPE;

HEAT PIPES;

EID: 0036118333     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)