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Volumn , Issue , 2002, Pages
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The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC DEVICES;
ACTUATORS;
BIOMEDICAL EQUIPMENT;
COMPUTER AIDED DESIGN;
COMPUTER SIMULATION;
FLUIDIC DEVICES;
OPTICAL DEVICES;
PROBES;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICES;
SENSORS;
VALVES (MECHANICAL);
DERMABRADERS;
EIREV;
INERTIAL SENSORS;
LASER CONTROLLED FRACTURING;
MICROFLUIDIC TRANSDERMAL INTERFACING;
MICROSCOPY PROBES;
PHYSICAL SENSORS;
PLASTIC SURGICAL APPLICATIONS;
PROBE CARDS;
THERMOCAPILLARY PUMPS;
MICROELECTROMECHANICAL DEVICES;
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EID: 0036118054
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Review |
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Times cited : (2)
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References (0)
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