Water usage reduction in a semiconductor fabricator

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2002, Pages 340-346

  Klusewitz, Greg ^a   McVeigh, Jim ^a  

^a Fairchild Semiconductor Corporation   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SEMICONDUCTOR DEVICE MANUFACTURE; SIGNAL PROCESSING; SILICON WAFERS; WATER TREATMENT PLANTS;

SEMICONDUCTOR FABRICATOR; WATER USAGE REDUCTION;

ELECTRONICS INDUSTRY;

EID: 0036079313     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/ASMC.2002.1001630     Document Type: Article

References (1)