|
Volumn , Issue , 2002, Pages 184-189
|
Energy and chemical use in the production chain for microchips
a
|
Author keywords
Chemical use; Energy; Life cycle assessment; Microchip; Semiconductor device
|
Indexed keywords
CHEMICALS;
DYNAMIC RANDOM ACCESS STORAGE;
ENERGY UTILIZATION;
ENTROPY;
ENVIRONMENTAL IMPACT;
FOSSIL FUELS;
LIFE CYCLE;
MICROPROCESSOR CHIPS;
QUARTZ;
SILICON WAFERS;
CHEMICAL USE;
LIFE CYCLE ASSESSMENT;
MICROCHIPS;
INTEGRATED CIRCUIT MANUFACTURE;
|
EID: 0036079298
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
|
References (25)
|