Trace gas analysis by diode laser cavity ring-down spectroscopy

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2002, Pages 319-323

  Yan, Wen Bin ^a   Krusen, Calvin ^a   Dudek, John ^a   Lehmann, Kevin ^a   Rabinowitz, Paul ^a  

^a Tiger Optics LLC   (United States)

Author keywords

Cavity ring down spectroscopy; Continuous monitoring; CRDS; Laser spectroscopy; Process analyzers; Trace gas analysis; Trace gas impurities; Trace moisture

Indexed keywords

ABSORPTION SPECTROSCOPY; GAS ABSORPTION; LIGHT TRANSMISSION; MASS SPECTROMETERS; MOISTURE DETERMINATION; SEMICONDUCTOR LASERS; TRACE ANALYSIS;

ATMOSPHERIC PRESSURE IONIZATION MASS SPECTROMETER; BEER LAW; CAVITY RING-DOWN SPECTROSCOPY; LASER SPECTROSCOPY; TRACE GAS ANALYSIS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036079259     PISSN: 1523553X     EISSN: None     Source Type: Journal    
DOI: 10.1109/LEOS.2001.969094     Document Type: Article

References (8)

1. Measuring moisture in corrosive gases
2. Ring-down cavity spectroscopy cell using continuous wave excitation for trace species detection