Innovations of economical 300/450mm IC fabricators

IEEE International Symposium on Semiconductor Manufacturing Conference, Proceedings

Volumn , Issue , 2002, Pages 150-154

  Wu, Bevan P F ^a  

^a Bevan Wu and Associates   (United States)

Author keywords

Architecture; Cost of ownership; Equipment design; IC fab design; IC fab operations; IC Fabricator; IC manufacturing economics; Semiconductor

Indexed keywords

AUTOMATION; ECONOMICS; LIFE CYCLE; SEMICONDUCTOR DEVICE MANUFACTURE;

COST OF OWNERSHIP; INTEGRATED CIRCUIT MANUFACTURING ECONOMICS; SEMICONDUCTOR EQUIPMENT DESIGN;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0036079122     PISSN: 1523553X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Modular clean room for effective integrated circuit manufacturing - MIRL ERL joint accomplishment
2. Survey of 300mm wafer fab designs