Fabrication and characterization of two-dimensional photonic crystal waveguides etched in InP-based heterostructure

Conference Proceedings-International Conference on Indium Phosphide and Related Materials

Volumn , Issue , 2002, Pages 417-420

  Mulot, M ^a   Anand, S ^a   Swillo, M ^a   Qiu, M ^a   Jaskorzynska, B ^a   Talneau, A ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

PHOTONIC CRYSTALS (PC);

CRYSTALS; FABRICATION; HETEROJUNCTIONS; ION BEAMS; OPTIMIZATION; REACTIVE ION ETCHING; SEMICONDUCTING INDIUM PHOSPHIDE;

OPTICAL WAVEGUIDES;

EID: 0036047947     PISSN: 10928669     EISSN: None     Source Type: Journal    
DOI: 10.1109/ICIPRM.2002.1014456     Document Type: Article

References (5)

1. Dry etching of photonic crystals in InP based materials
2. Characterization and modeling of InP/GaInAsP photonic-crystal waveguides