Temperature effects modeling in silicon piezoresistive pressure sensor

Proceedings of the Mediterranean Electrotechnical Conference - MELECON

Volumn 1, Issue , 2002, Pages 36-40

  Aljancic, U ^a   Resnik, D ^a   Vrtacnik, D ^a   Mozek, M ^a   Amon, S ^a  

^a UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Offset voltage temperature drift compensation; Piezoresistive pressure sensor; Temperature effects

Indexed keywords

COMPUTER AIDED ANALYSIS; COMPUTER SIMULATION; PRESSURE MEASUREMENT; THERMAL CONDUCTIVITY; THERMAL EFFECTS; THERMAL EXPANSION; THERMAL STRESS; THRESHOLD VOLTAGE;

OFFSET VOLTAGE; PIEZORESISTIVE EFFECTS; SILICON PIEZORESISTIVE PRESSURE SENSOR; TEMPERATURE DRIFT;

SILICON SENSORS;

EID: 0036045573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. A graphical representation of the piezoresistance coefficients in silicon
2. Temperature dependencies of silicon piezoresitive pressure sensor
3. Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors
4. Numerical analysis of silicon piezoresistive pressure sensor with variable diaphragm thickness