|
Volumn 45, Issue 1, 2002, Pages 104-106
|
A low-pressure excimer light source for a spectral region of 170-310 nm
a a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
EFFICIENCY;
GLOW DISCHARGES;
LIGHT SOURCES;
OPTICAL PUMPING;
OPTIMIZATION;
PERFORMANCE;
SPECTRAL RANGES;
EXCIMER LASERS;
|
EID: 0036032790
PISSN: 00328162
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
Times cited : (36)
|
References (0)
|