The design of a cost effective multi wavelength development rate monitoring tool

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4689 II, Issue , 2002, Pages 937-948

  Scheer, Steven A ^a   Brodsky, Colin J ^a   Robertson, Stewart A ^b   Kang, Doris ^b  

^a Thickness Detection Solutions   (United States)

^b SHIPLEY COMPANY   (United States)

Author keywords

Deprotection; Multi wavelength development rate monitor; Standing wave; Surface inhibition

Indexed keywords

ALGORITHMS; COST EFFECTIVENESS; INFORMATION ANALYSIS; LIGHT INTERFERENCE; RESEARCH AND DEVELOPMENT MANAGEMENT; SPECTRUM ANALYSIS; THIN FILMS;

STANDING WAVES; SURFACE INHIBITION;

PHOTORESISTS;

EID: 0036031568     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.473422     Document Type: Article

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