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Volumn 4710, Issue , 2002, Pages 618-625
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Heat pulse optimization by SPICE simulation for transient thermography in silicon
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Author keywords
Electro thermal model; Heat pulse optimization; Heat transfer modeling; RC network; Silicon; SPICE; Thermography
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Indexed keywords
CAPACITANCE;
COMPUTER SIMULATION;
CRYSTAL DEFECTS;
ELECTRIC RESISTANCE;
HEAT TRANSFER;
INTEGRATED CIRCUITS;
SILICON WAFERS;
THERMAL STRESS;
HEAT PULSE OPTIMIZATION;
THERMOGRAPHY (IMAGING);
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EID: 0036030898
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.459615 Document Type: Conference Paper |
Times cited : (5)
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References (12)
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