Bottom anti-reflective coatings: Fluid property characterization and wetting tendency

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4690 II, Issue , 2002, Pages 1052-1064

  Hehmeyer, Owen ^a   Singh, Abhishek ^a   Subramanian, Ramkumar ^b   Bernard, Joffre ^a  

^a 3D Application Research Group   (United States)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

BARC; Bottom antireflective coating; Contact angle; Via fill; Wetting

Indexed keywords

CONTACT ANGLE; DEGASSING; GONIOMETERS; HYDROPHILICITY; MASS SPECTROMETERS; POLYMERS; SILICON COMPOUNDS; SURFACE TENSION; THERMOANALYSIS; VAPORS; VISCOSITY OF LIQUIDS; WETTING;

PENDANT DROP ANALYSIS;

ANTIREFLECTION COATINGS;

EID: 0036030135     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474181     Document Type: Article

References (9)

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