Synthesis of ferroelectric YMnO3 thin film by chemical solution deposition

Key Engineering Materials

Volumn 214-215, Issue , 2002, Pages 151-156

  Suzuki, K ^a   Nishizawa, K ^a   Miki, T ^a   Kato, K ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Alkoxides; Chemical solution deposition; Ferroelectrics; Nonvolatile memory; Thin film; YMnO3

Indexed keywords

CRYSTALLIZATION; MICROSTRUCTURE; RAPID THERMAL ANNEALING; REACTION KINETICS; SAPPHIRE; SUBSTRATES; SYNTHESIS (CHEMICAL); YTTRIUM COMPOUNDS;

CHEMICAL SOLUTION DEPOSITION;

FERROELECTRIC THIN FILMS;

EID: 0036027896     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (15)