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Volumn 214-215, Issue , 2002, Pages 163-168

Metal-oxide-semiconductor (MOS) devices composed of biomimetically synthesized TiO2 dielectric thin films

(4) Wang, D a Masuda, Y a Seo, W S a Koumoto, K a

Author keywords

Biomimetic method; Dielectrics; MOS; Thin film; Titanium dioxide

Indexed keywords

DIELECTRIC FILMS; ELECTRIC FIELD EFFECTS; LEAKAGE CURRENTS; MOS DEVICES; PERMITTIVITY; SELF ASSEMBLY; SEMICONDUCTING SILICON; SYNTHESIS (CHEMICAL); TITANIUM DIOXIDE;

DIELECTRIC THIN FILMS;

THIN FILMS;

EID: 0036027696 PISSN: 10139826 EISSN: 16629795 Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (28)

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