Kelvin probe force microscopy of beveled semiconductors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 5, 2002, Pages 2133-2136

  Ferguson, R S ^a   Fobelets, K ^a   Cohen, L F ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE QUALITY; MULTILAYERS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR QUANTUM WELLS; SURFACE ROUGHNESS; SYNTHETIC DIAMONDS;

BEVELING; DIGITAL INSTRUMENTS NANOSCOPE; KELVIN PROBE FORCE MICROSCOPY; NANOSENSORS POINTPROBE ELECTROSTATIC FORCE MICROSCOPY; POLYCRYSTALLINE DIAMONDS;

MICROSCOPIC EXAMINATION;

EID: 0036026390     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1511215     Document Type: Article

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