Trace element analysis of synthetic mono- and poly-crystalline CaF2 by ultraviolet laser ablation inductively coupled plasma mass spectrometry at 266 and 193 nm

Spectrochimica Acta - Part B Atomic Spectroscopy

Volumn 57, Issue 6, 2002, Pages 1057-1070

  Koch, J ^a   Feldmann, I ^a   Jakubowski, N ^a   Bolshov, M ^a,d   Niemax, K ^a   Hergenroder R ^a   Hattendorf, B ^b   Gunther D ^b   Engel, U ^c  

^a LEIBNIZ INSTITUT FÜR ANALYTISCHE WISSENSCHAFTEN ISAS E V   (Germany)

^b LABORATORY OF INORGANIC CHEMISTRY   (Switzerland)

^c MERCK KGAA   (Germany)

^d INSTITUTE OF SPECTROSCOPY   (Russian Federation)

Author keywords

CaF2; Excimer; Inductively coupled plasma mass spectrometry; Laser ablation; Nd:YAG; Optical lithography

Indexed keywords

CALCIUM COMPOUNDS; EXCIMER LASERS; INDUCTIVELY COUPLED PLASMA; LASER ABLATION; LITHOGRAPHY; MASS SPECTROMETRY; POLYCRYSTALLINE MATERIALS;

OPTICAL LITHOGRAPHY;

TRACE ELEMENTS;

EID: 0036023197     PISSN: 05848547     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0584-8547(02)00033-2     Document Type: Article

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