The effect of high implant doses and high ion current densities on polyimide film properties

Technical Physics

Volumn 47, Issue 4, 2002, Pages 459-464

  Popok, V N ^a   Azarko, I I ^a   Khaibullin, R I ^b  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036011417     PISSN: 10637842     EISSN: None     Source Type: Journal    
DOI: 10.1134/1.1470595     Document Type: Article

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