Micro-patterning of copper based on photolithographed self-assembly monolayers

Chinese Chemical Letters

Volumn 13, Issue 2, 2002, Pages 163-164

  Huang, Lan ^a   Xu, Li Na ^a   Shen, Hao Ying ^a   Zhang, Hai Qian ^a   Gu, Ning ^a  

^a SOUTHEAST UNIVERSITY   (China)

Author keywords

Deposition; Micro pattern; MPTS; Photolithograph; SAMs; SEM

Indexed keywords

(3 MERCAPTOPROPYL)TRIMETHOXYSILANE; COPPER; SILANE DERIVATIVE; UNCLASSIFIED DRUG;

ELECTRONICS; METHODOLOGY; SCANNING ELECTRON MICROSCOPY; SHORT SURVEY;

EID: 0036002204     PISSN: 10018417     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Short Survey

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