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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 3, 2002, Pages 834-842

Comparative study on alloy cluster formation in Co-Al and Co-Pt systems

(3) Konno, Toyohiko J a Yamamuro, Saeki a Sumiyama, Kenji b

a TOHOKU UNIVERSITY (Japan)

b NAGOYA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AGGLOMERATION; COMPOSITION EFFECTS; COOLING; HIGH TEMPERATURE EFFECTS; MONOMERS; PARTICLE SIZE ANALYSIS; PHASE DIAGRAMS; PLASMAS; SPUTTERING; THERMODYNAMICS; VAPORS;

ALLOY CLUSTERS;

COBALT ALLOYS;

EID: 0035998503 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1470518 Document Type: Conference Paper

Times cited : (17)

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