Fabrication of a high-aspect-ratio structure (HARS) and a 3D feed-horn-shaped structure array for a 3D MEMS antenna array by using a novel UV lithography apparatus

Journal of the Korean Physical Society

Volumn 41, Issue 4, 2002, Pages 552-556

  Park, Jong Yeon ^a   Kim, Kun Tae ^a   Shin, Hyun Joon ^a   Moon, Sung ^a   Pak, James Jungho ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

3D MEMS; High aspect ratio structure(HARS); UV lithography

Indexed keywords

EID: 0035981413     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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