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Volumn 94, Issue 1-2, 2001, Pages 113-116
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A piezoelectric spherical motor with two degree-of-freedom
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Author keywords
Piezoelectric actuator; Spherical motor; Ultra precision displacement measurement
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Indexed keywords
BALL BEARINGS;
DEGREES OF FREEDOM (MECHANICS);
ELLIPSOMETRY;
MICROACTUATORS;
MOBILE ROBOTS;
PIEZOELECTRIC DEVICES;
RESONANCE;
ROTORS;
SOFTWARE PROTOTYPING;
TRAJECTORIES;
ULTRASONIC DEVICES;
ULTRASONIC SHPERICAL MOTORS;
ELECTRIC MOTORS;
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EID: 0035980436
PISSN: 09244247
EISSN: None
Source Type: Journal
DOI: 10.1016/S0924-4247(01)00671-9 Document Type: Article |
Times cited : (11)
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References (5)
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