On the mechanism of hydrogen sensing with SiO2 modificated high temperature Ga2O3 sensors

Sensors and Actuators, B: Chemical

Volumn 78, Issue 1-3, 2001, Pages 202-207

  Weh, T ^a   Frank, J ^a   Fleischer, M ^a   Meixner, H ^a  

^a SIEMENS AG   (Germany)

Author keywords

Diffusion; Filter; Hydrogen; Metal oxide; SiO2; Space charge

Indexed keywords

CHEMICAL MODIFICATION; ELECTRIC SPACE CHARGE; FILTERS (FOR FLUIDS); GALLIUM COMPOUNDS; HIGH TEMPERATURE PROPERTIES; HYDROGEN; OXIDES; SILICA;

METAL OXIDES;

CHEMICAL SENSORS;

EID: 0035975011     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00813-9     Document Type: Article

References (4)

1. 2 layer
2. 3 thin films
3. Optimization of physical gas filters for selective high temperature gas sensors