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Volumn 323, Issue 1-2, 2001, Pages 147-151
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Improved synthesis of the heteronuclear phosphido Mo-W complex [(CO)4Mo(μ-PMe2)2W(CO)4] and its use as MOCVD precursor
a
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Author keywords
MOCVD precursors; Molybdenum Tungsten carbonyls; Molybdenum Tungsten films; Phosphido bridged carbonyls
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Indexed keywords
CHROMATOGRAPHY;
CYCLIZATION;
DEPOSITION;
MOLYBDENUM ALLOYS;
MOLYBDENUM OXIDE;
PHOSPHORUS COMPOUNDS;
BRIDGED CARBONYLS;
DEPOSITION CONDITIONS;
FLASH CHROMATOGRAPHY;
HETERONUCLEAR COMPLEXES;
MOCVD PRECURSORS;
THERMAL CYCLIZATION;
TUNGSTEN CARBONYLS;
TUNGSTEN FILMS;
TUNGSTEN COMPOUNDS;
ALLOY;
DIMER;
MOLYBDENUM COMPLEX;
PHOSPHINE DERIVATIVE;
TUNGSTEN DERIVATIVE;
ARTICLE;
CHEMICAL REACTION;
CHROMATOGRAPHY;
CYCLIZATION;
FILM;
REACTION ANALYSIS;
SYNTHESIS;
TEMPERATURE;
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EID: 0035968866
PISSN: 00201693
EISSN: None
Source Type: Journal
DOI: 10.1016/S0020-1693(01)00603-X Document Type: Article |
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Times cited : (12)
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References (16)
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