Real-time optical characterization of thin film growth

Materials Science and Engineering: B

Volumn 87, Issue 1, 2001, Pages 1-22

  Dietz, N ^a  

^a GEORGIA STATE UNIVERSITY   (United States)

Author keywords

Chemical beam epitaxy; Optical characterization; Thin film growth

Indexed keywords

CHEMICAL BEAM EPITAXY; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; INTERFACES (MATERIALS); LIGHT POLARIZATION; OPTICAL DEVICES; PROCESS CONTROL; REACTION KINETICS; SPECTROSCOPIC ANALYSIS; SURFACE REACTIONS;

ORGANOMETALLIC CHEMICAL VAPOR DEPOSITION (OMCVD);

THIN FILMS;

EID: 0035944612     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00711-5     Document Type: Review

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