Recursive solution of an inverse heat transfer problem in rapid thermal processing systems

International Journal of Heat and Mass Transfer

Volumn 44, Issue 11, 2001, Pages 2053-2065

  Park, H M ^a   Jung, W S ^a  

^a Sogang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

GALERKIN METHODS; HEAT TRANSFER; INVERSE PROBLEMS; KALMAN FILTERING; ORDINARY DIFFERENTIAL EQUATIONS; PARTIAL DIFFERENTIAL EQUATIONS;

RAPID THERMAL PROCESSING;

RAPID THERMAL ANNEALING;

HEAT TRANSFER; OXIDATION; THERMAL ANALYSIS;

EID: 0035938237     PISSN: 00179310     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0017-9310(00)00258-1     Document Type: Article

References (19)

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8. The dynamics of coherent structures in the wall region of a turbulent boundary layer
9. In-situ fabrication and process control techniques in rapid thermal processing
10. Thermal and stress analysis of semiconductor wafers in a rapid thermal processing oven
11. On the solution of inverse heat transfer problem using the Karhunen-Loève Galerkin method
12. The Karhunen-Loève Galerkin method for the inverse natural convection problems