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Volumn 80, Issue 1-3, 2001, Pages 178-183

Contactless electromodulation and surface photovoltage spectroscopy for the nondestructive, room temperature characterization of wafer-scale III-V semiconductor device structures

(1) Pollak, Fred H a,b

a CITY UNIVERSITY OF NEW YORK (United States)

b Semiconductor Characterization Instruments Inc ^* (United States)

Author keywords

Contactless electromodulation; Contactless electroreflectance; Heterojunction bipolar transistors; Nondestructive; Photoreflectance; Semiconductor device

Indexed keywords

HETEROJUNCTION BIPOLAR TRANSISTORS; LIGHT REFLECTION; NONDESTRUCTIVE EXAMINATION; SILICON WAFERS; SURFACE STRUCTURE;

CONTACTLESS ELECTROMODULATION; SURFACE PHOTOVOLTAGE SPECTROSCOPY;

SEMICONDUCTOR DEVICE STRUCTURES;

EID: 0035932282 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(00)00618-8 Document Type: Article

Times cited : (19)

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