Metrology of semiconductor device structures by cross-sectional AFM

Materials Science and Engineering: B

Volumn 80, Issue 1-3, 2001, Pages 138-141

  Jenkins, C ^a   Westwood, D I ^a   Elliott, M ^a   Macdonald, J E ^a   Meaton, C ^b   Bland, S ^b  

^a CARDIFF UNIVERSITY   (United Kingdom)

^b Epitaxial Products International   (United Kingdom)

Author keywords

AFM, Metrology; Semiconductors

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; OXIDATION; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR QUANTUM WELLS;

CROSS-SECTIONAL ATOMIC FORCE MICROSCOPY;

HETEROJUNCTIONS;

EID: 0035932241     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(00)00634-6     Document Type: Article

References (3)