Multi-aperture extraction system with micro-beamlet switching capability

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 474, Issue 1, 2001, Pages 86-92

  Lee, Y ^a   Barletta, W A ^a   Leung, K N ^a   Ngo, V V ^a   Scott, P ^a   Wilcox, M ^a   Zahir, N ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTRON BEAMS; ION BEAMS; MICROOPTICS;

ION PROJECTION LITHOGRAPHY (IPL); MULTI-APERTURE EXTRACTION SYSTEMS;

ION BEAM LITHOGRAPHY;

EID: 0035929934     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-9002(01)00864-6     Document Type: Article

References (4)