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Volumn 87, Issue 3, 2001, Pages 214-221

Growth of Si twinning superlattice

Author keywords

Crystal; Si twinning; Superlattice

Indexed keywords

ANNEALING; CRYSTAL DEFECTS; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SUBSTRATES; THERMODYNAMIC STABILITY; TWINNING;

EID: 0035915284     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(01)00733-4     Document Type: Article
Times cited : (14)

References (33)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.