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Volumn 44, Issue 8-9, 2001, Pages 1837-1840
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Microstructural investigation of TiAl thin films grown on (111) oriented silicon substrate by DC magnetron sputtering
a a a a a |
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Author keywords
Atomic force microscopy (AFM); Microstructure; Thin films; TiAl; Transmission electron microscopy (TEM)
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
BINARY ALLOYS;
CRYSTAL MICROSTRUCTURE;
FILM GROWTH;
FILM PREPARATION;
MAGNETRON SPUTTERING;
NANOSTRUCTURED MATERIALS;
SILICON;
SUBSTRATES;
SURFACE ROUGHNESS;
THIN FILMS;
TITANIUM ALLOYS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
FACETTED CRYSTALLITES;
GLOBULAR CRYSTALLITES;
INTERMETALLICS;
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EID: 0035906656
PISSN: 13596462
EISSN: None
Source Type: Journal
DOI: 10.1016/S1359-6462(01)00803-X Document Type: Article |
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Times cited : (5)
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References (8)
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