Ion sputtering of microparticles in SIMS depth profile analysis

Vacuum

Volumn 63, Issue 4, 2001, Pages 685-689

  Konarski, Piotr ^a   Iwanejko, Iwonna ^a   Mierzejewska, Agnieszka ^a   Wymysłowski, Artur ^b  

^a INSTITUTE OF VACUUM TECHNOLOGY   (Poland)

^b WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Core shell structure; Depth profiling; Microparticles; Sample rotation SIMS

Indexed keywords

AEROSOLS; ION BEAMS; ION BOMBARDMENT; SECONDARY ION MASS SPECTROMETRY; SPUTTERING; SURFACE ROUGHNESS;

DEPTH PROFILING; MICROPARTICLES;

PARTICLES (PARTICULATE MATTER);

EID: 0035899317     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00258-5     Document Type: Conference Paper

References (16)

1. Methods of surface analysis