Monte Carlo modeling of the IBAD growth of the optical films

Vacuum

Volumn 63, Issue 4, 2001, Pages 613-617

  Oleszkiewicz, Waldemar ^a   Romiszowski, Piotr ^b  

^a WROCLAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b UNIVERSITY OF WARSAW   (Poland)

Author keywords

IBAD; Monte Carlo simulation; Optical layers; Thin film growth

Indexed keywords

BALLISTICS; COMPUTER SIMULATION; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; MONTE CARLO METHODS; PHYSICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; THIN FILMS;

OPTICAL QUALITY;

OPTICAL FILMS;

EID: 0035899247     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00249-4     Document Type: Conference Paper

References (10)