Optical studies on thin copper films on Si(1 1 1)

Applied Surface Science

Volumn 179, Issue 1-4, 2001, Pages 68-72

  Masten, A ^a   Wissmann, P ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

Copper; Ellipsometry; Island films; Silicon; Surface plasmon polaritons; Two layer model

Indexed keywords

ANNEALING; COAGULATION; COPPER; DEPOSITION; ELLIPSOMETRY; INTERFACES (MATERIALS); SEMICONDUCTING SILICON; THIN FILMS;

SURFACE PLASMON POLARITONS;

SEMICONDUCTING FILMS;

EID: 0035898841     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00265-3     Document Type: Article

References (33)