Femtosecond multistep laser etching of transparent amorphous organic film

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 40, Issue 10 B, 2001, Pages

  Hosokawa, Yoichiroh ^a   Yashiro, Masaki ^a   Asahi, Tsuyoshi ^a   Masuhara, Hiroshi ^a   Kadota, Toshiaki ^a   Shirota, Yasuhiko ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Femtosecond laser ablation; Multistep laser etching; Optical interference effect; Organic amorphous film

Indexed keywords

AMORPHOUS FILMS; ETCHING; LIGHT INTERFERENCE; TRANSPARENCY;

FEMTOSECOND LASER ABLATION; LASER ETCHING; OPTICAL INTERFERENCE EFFECT; ORGANIC AMORPHOUS FILM;

LASER ABLATION;

EID: 0035888708     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.l1116     Document Type: Letter

References (11)