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Volumn 115, Issue 7, 2001, Pages 3105-3111
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Adapting optimal control theory and using learning loops to provide experimentally feasible shaping mask patterns
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Author keywords
[No Author keywords available]
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Indexed keywords
CONSTRAINT THEORY;
EIGENVALUES AND EIGENFUNCTIONS;
ELECTRON ENERGY LEVELS;
ELECTRON TRANSITIONS;
EVOLUTIONARY ALGORITHMS;
FOURIER TRANSFORMS;
LASER PULSES;
POTASSIUM;
WAVE EQUATIONS;
MASK PATTERNS;
OPTIMAL CONTROL SYSTEMS;
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EID: 0035880928
PISSN: 00219606
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1378817 Document Type: Article |
Times cited : (65)
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References (28)
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