Atomic force microscope for planetary applications

Sensors and Actuators, A: Physical

Volumn 91, Issue 3, 2001, Pages 321-325

  Akiyama, T ^a   Gautsch, S ^a   De Rooij, N F ^a   Staufer, U ^a   Niedermann, P ^b   Howald, L ^c   Muller D ^c   Tonin, A ^d   Hidber, H R ^d   Pike, W T ^e   Hecht, M H ^e  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b CSEM   (Switzerland)

^c Nanosurf AG   (Switzerland)

^d UNIVERSITY OF BASEL   (Switzerland)

^e CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

AFM; Array; Mars; Space

Indexed keywords

ASTRONOMY; COMPUTER CONTROL SYSTEMS; DIAMONDS; MICROSCOPES; MICROSENSORS; OPTICAL DEVICES; OPTICAL RESOLVING POWER; PIEZOELECTRIC DEVICES; PLANETS; SILICON; CANTILEVER BEAMS; DEFLECTION (STRUCTURES); NATURAL FREQUENCIES; SILICON SENSORS;

ATOMIC FORCE MICROSCOPE; ELECTROMAGNETIC SCANNER; MARS; PIEZORESISTIVE DEFLECTION SENSORS; PLANETARY APPLICATIONS; SPACE; CONTROLLER BOARD; MICRO FABRICATED SENSOR CHIP;

ATOMIC FORCE MICROSCOPY;

EID: 0035880207     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00602-1     Document Type: Article

References (5)