Analysis and testing of a silicon intrinsic-point heater in a micropropulsion application

Sensors and Actuators, A: Physical

Volumn 91, Issue 3, 2001, Pages 249-255

  Bayt, Robert L ^a   Breuer, Kenneth S ^b  

^a UNITED TECHNOLOGIES RESEARCH CENTER   (United States)

^b Brown University   (United States)

Author keywords

Deep reactive ion etching; MEMS; Microheater; Micropropulsion

Indexed keywords

COMPUTER SIMULATION; ELECTRONIC EQUIPMENT TESTING; ENERGY TRANSFER; FINS (HEAT EXCHANGE); FUEL ECONOMY; HEAT EXCHANGERS; HIGH TEMPERATURE PROPERTIES; NOZZLES; REACTIVE ION ETCHING; SILICON; HEATING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; TEMPERATURE;

DEEP REACTIVE ION ETCHING; MICROHEATER; MICROPROPULSION; SILICON INTRINSIC-POINT HEATER; MICROTHRUSTER;

MICROELECTROMECHANICAL DEVICES; HEAT EXCHANGERS;

EID: 0035880206     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00594-5     Document Type: Article

References (10)

1. Micromachined chemical reactors for surface catalyzed oxidation reactions
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3. Thermally driven phase-change microactuation
4. Batch-fabricated resistojets: Initial results
5. Electrical properties of pure silicon and silicon alloys containing boron and phosphorous
6. DRIE-fabricated nozzles for generating supersonic flows in micropropulsion systems
7. Fabrication and testing of micron-sized cold-gas thrusters