High-transmittance surface textures formed by plasma etching of metallophthalocyanine films

Journal of Applied Physics

Volumn 89, Issue 12, 2001, Pages 7711-7715

  Sakata, Hajime ^a  

^a CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035875649     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1371950     Document Type: Article

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