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Volumn 20, Issue 12, 2001, Pages 1121-1123
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MOS capacitor properties passivated with aluminum phosphate glasses and effects of metal electrodes
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM COMPOUNDS;
ANNEALING;
ELECTRODES;
GLASS;
INFRARED SPECTROSCOPY;
INFRARED TRANSMISSION;
MELTING;
PASSIVATION;
REFRACTIVE INDEX;
SPECTROPHOTOMETERS;
SPUTTER DEPOSITION;
STAINLESS STEEL;
ALUMINUM PHOSPHATE;
DRY-AIR-BUBBLING;
METAL ELECTRODES;
MOS CAPACITORS;
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EID: 0035874835
PISSN: 02618028
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1010940206706 Document Type: Article |
Times cited : (2)
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References (23)
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