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Volumn 89, Issue 8, 2001, Pages 4310-4317

Photoluminescence and structural studies on extended defect evolution during high-temperature processing of ion-implanted epitaxial silicon

(7) Giri, P K a,c Coffa, S b Raineri, V b Privitera, V b Galvagno, G c La Ferla, A c Rimini, E c

a INDIRA GANDHI CENTRE FOR ATOMIC RESEARCH (India)

b CNR IMETEM (Italy)

c UNIVERSITY OF CATANIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035871048 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1357464 Document Type: Article

Times cited : (11)

References (42)

1
- 0011139749
- W. M. Bullis, Mater. Sci. Eng., B 71, 276 (2000).
- (2000) Mater. Sci. Eng., B , vol.71 , pp. 276
- Bullis, W.M.¹

2
- 0033896124
- R. Tian, Nucl. Instrum. Methods Phys. Res. B 160, 355 (2000).
- (2000) Nucl. Instrum. Methods Phys. Res. B , vol.160 , pp. 355
- Tian, R.¹

3
- 0023860584
- K. S. Jones, S. Prussin, and E. R. Weber, Appl. Phys. A 45, 1 (1988).
- (1988) Appl. Phys. A , vol.45 , pp. 1
- Jones, K.S.¹ Prussin, S.² Weber, E.R.³

4
- 36549095214
- M. Tamura, N. Natsuaki, Y. Wada, and E. Mitani, J. Appl. Phys. 59, 3417 (1986).
- (1986) J. Appl. Phys. , vol.59 , pp. 3417
- Tamura, M.¹ Natsuaki, N.² Wada, Y.³ Mitani, E.⁴

5
- 0032714978
- A. Claverie, L. F. Giles, M. Omri, B. de Mauduit, G. Ben Assayag, and D. Mathiot, Nucl. Instrum. Methods Phys. Res. B 147, 1 (1999).
- (1999) Nucl. Instrum. Methods Phys. Res. B , vol.147 , pp. 1
- Claverie, A.¹ Giles, L.F.² Omri, M.³ De Mauduit, B.⁴ Ben Assayag, G.⁵ Mathiot, D.⁶

6
- 0033904941
- K. Sumino, Mater. Sci. Eng., B 72, 67 (2000).
- (2000) Mater. Sci. Eng., B , vol.72 , pp. 67
- Sumino, K.¹

7
- 0031191541
- G. Kissinger, D. Graf, U. Lambert, T. Grabolla, and H. Richter, Semicond. Sci. Technol. 12, 933 (1997).
- (1997) Semicond. Sci. Technol. , vol.12 , pp. 933
- Kissinger, G.¹ Graf, D.² Lambert, U.³ Grabolla, T.⁴ Richter, H.⁵

8
- 0033906797
- D. Barge, J. P. Jolly, G. Rolland, and B. Pichaud, Mater. Sci. Eng., B 71, 276 (2000).
- (2000) Mater. Sci. Eng., B , vol.71 , pp. 276
- Barge, D.¹ Jolly, J.P.² Rolland, G.³ Pichaud, B.⁴

9
- 0004893209
- G. Davies, Phys. Rep. 176, 83 (1989).
- (1989) Phys. Rep. , vol.176 , pp. 83
- Davies, G.¹

10
- 0021455374
- N. Magnea, A. Lazrak, and J. L. Pautrat, Appl. Phys. Lett. 45, 60 (1984).
- (1984) Appl. Phys. Lett. , vol.45 , pp. 60
- Magnea, N.¹ Lazrak, A.² Pautrat, J.L.³

11
- 36549099057
- H. Weman, B. Monemar, and P. O. Holtz, Appl. Phys. Lett. 47, 1110 (1984).
- (1984) Appl. Phys. Lett. , vol.47 , pp. 1110
- Weman, H.¹ Monemar, B.² Holtz, P.O.³

12
- 0021461654
- J. Wagner, J. C. Gelpey, and R. T. Hodgson, Appl. Phys. Lett. 45, 47 (1984).
- (1984) Appl. Phys. Lett. , vol.45 , pp. 47
- Wagner, J.¹ Gelpey, J.C.² Hodgson, R.T.³

13
- 0001091041
- C. Spinella, S. Coffa, C. Bongiorno, S. Pannitteri, and M. G. Grimaldi, Appl. Phys. Lett. 76, 173 (2000).
- (2000) Appl. Phys. Lett. , vol.76 , pp. 173
- Spinella, C.¹ Coffa, S.² Bongiorno, C.³ Pannitteri, S.⁴ Grimaldi, M.G.⁵

14
- 0028523288
- S. M. Hu, Mater. Sci. Eng., R 13, 105 (1994).
- (1994) Mater. Sci. Eng., R , vol.13 , pp. 105
- Hu, S.M.¹

15
- 0021784155
- and references therein
- R. Sauer, J. Weber, J. Stolz, E. R. Weber, K.-H. Kusters, and H. Alexander. Appl. Phys. A 36, 1 (1985), and references therein.
- (1985) Appl. Phys. A , vol.36 , pp. 1
- Sauer, R.¹ Weber, J.² Stolz, J.³ Weber, E.R.⁴ Kusters, K.-H.⁵ Alexander, H.⁶

16
- 0024751957
- A. R. Peaker, B. Hamilton, G. R. Lahiji, I. E. Ture, and G. Lorimer, Mater. Sci. Eng., B 4, 123 (1989).
- (1989) Mater. Sci. Eng., B , vol.4 , pp. 123
- Peaker, A.R.¹ Hamilton, B.² Lahiji, G.R.³ Ture, I.E.⁴ Lorimer, G.⁵

17
- 0347610341
- V. Higgs, M. Goulding, A. Brinklow, and P. Kightley, Appl. Phys. Lett. 60, 1369 (1989).
- (1989) Appl. Phys. Lett. , vol.60 , pp. 1369
- Higgs, V.¹ Goulding, M.² Brinklow, A.³ Kightley, P.⁴

18
- 0029308392
- M. Saritas and A. R. Peaker, Solid-State Electron. 38, 1025 (1995).
- (1995) Solid-State Electron , vol.38 , pp. 1025
- Saritas, M.¹ Peaker, A.R.²

19
- 0026745761
- J. H. Evans, J. Kaniewski, M. Kaniewska, and J. S. Rimmer, Semicond. Sci. Technol. 7, A41 (1992).
- (1992) Semicond. Sci. Technol. , vol.7
- Evans, J.H.¹ Kaniewski, J.² Kaniewska, M.³ Rimmer, J.S.⁴

20
- 0018439616
- D. G. Schimmel, J. Electrochem. Soc. 126, 479 (1979).
- (1979) J. Electrochem. Soc. , vol.126 , pp. 479
- Schimmel, D.G.¹

21
- 36049059833
- P. J. Dean, J. R. Haynes, and W. F. Flood, Phys. Rev. 161, 711 (1967).
- (1967) Phys. Rev. , vol.161 , pp. 711
- Dean, P.J.¹ Haynes, J.R.² Flood, W.F.³

22
- 0001993312
- P. J. Schultz, T. D. Thomson, and R. G. Elliman, Appl. Phys. Lett. 60, 59 (1992).
- (1992) Appl. Phys. Lett. , vol.60 , pp. 59
- Schultz, P.J.¹ Thomson, T.D.² Elliman, R.G.³

23
- 0000478175
- S. K. Estreicher, J. Weber, A. Derecskei-Kovacs, and D. S. Marynick, Phys. Rev. B 55, 5037 (1997).
- (1997) Phys. Rev. B , vol.55 , pp. 5037
- Estreicher, S.K.¹ Weber, J.² Derecskei-Kovacs, A.³ Marynick, D.S.⁴

24
- 0023132540
- G. Davies, E. C. Lightowlers, and Z. E. Ciechanowska, J. Phys.: Condens. Matter 20, 191 (1997); H. Feick and E. R. Weber, Physica B 273, 497 (1999).
- (1997) J. Phys.: Condens. Matter , vol.20 , pp. 191
- Davies, G.¹ Lightowlers, E.C.² Ciechanowska, Z.E.³

25
- 0033335192
- G. Davies, E. C. Lightowlers, and Z. E. Ciechanowska, J. Phys.: Condens. Matter 20, 191 (1997); H. Feick and E. R. Weber, Physica B 273, 497 (1999).
- (1999) Physica B , vol.273 , pp. 497
- Feick, H.¹ Weber, E.R.²

26
- 0347839990
- in press
- P. K. Giri, S. Coffa, and F. Rimini, Appl. Phys. Lett. (in press).
- Appl. Phys. Lett.
- Giri, P.K.¹ Coffa, S.² Rimini, F.³

27
- 0010265124
- N.-E. Chabane-Sari, L. Thibaud, S. Kaddour, M. Berenguer, and D. Barbier, J. Appl. Phys. 71, 3320 (1992).
- (1992) J. Appl. Phys. , vol.71 , pp. 3320
- Chabane-Sari, N.-E.¹ Thibaud, L.² Kaddour, S.³ Berenguer, M.⁴ Barbier, D.⁵

28
- 0141537807
- and references therein
- I. A. Buyanova, W. M. Chen, A. Henry, W. X. Ni, G. V. Hanson, and B. Monemar, Phys. Rev. B 52, 12006 (1995), and references therein.
- (1995) Phys. Rev. B , vol.52 , pp. 12006
- Buyanova, I.A.¹ Chen, W.M.² Henry, A.³ Ni, W.X.⁴ Hanson, G.V.⁵ Monemar, B.⁶

29
- 0000434901
- H. Weman, B. Monemar, G. S. Oehrleim, and S. J. Jeng, Phys. Rev. B 42, 3109 (1990).
- (1990) Phys. Rev. B , vol.42 , pp. 3109
- Weman, H.¹ Monemar, B.² Oehrleim, G.S.³ Jeng, S.J.⁴

30
- 0027575768
- G. Galvagno, F. La Via, F. Priolo, and E. Rimini, Semicond. Sci. Technol. 8, 488 (1993).
- (1993) Semicond. Sci. Technol. , vol.8 , pp. 488
- Galvagno, G.¹ La Via, F.² Priolo, F.³ Rimini, E.⁴

31
- 0020830704
- J. Narayan, O. W. Holland, and B. R. Appleton, J. Vac. Sci. Technol. B 1, 871 (1983).
- (1983) J. Vac. Sci. Technol. B , vol.1 , pp. 871
- Narayan, J.¹ Holland, O.W.² Appleton, B.R.³

32
- 0346579886
- S. Prussin, J. Appl. Phys. 43, 733 (1972).
- (1972) J. Appl. Phys. , vol.43 , pp. 733
- Prussin, S.¹

33
- 0000252816
- N. Arai, S. Takeda, and M. Kohyama, Phys. Rev. Lett. 78, 4265 (1997).
- (1997) , vol.78 , pp. 4265
- Arai, N.¹ Takeda, S.² Kohyama, M.³ Lett, P.R.⁴

34
- 0032760761
- C. Ortiz, J. J. Grob, D. Mathiot, A. Claveri, C. Dubois, and R. Jerisian, Nucl. Instrum. Methods Phys. Res. B 147, 122 (1999).
- (1999) Nucl. Instrum. Methods Phys. Res. B , vol.147 , pp. 122
- Ortiz, C.¹ Grob, J.J.² Mathiot, D.³ Claveri, A.⁴ Dubois, C.⁵ Jerisian, R.⁶

35
- 0000486845
- D. K. Sadana, M. H. Norcott, R. G. Wilson, and U. Dahmen, Appl. Phys. Lett. 49, 1169 (1986).
- (1986) Appl. Phys. Lett. , vol.49 , pp. 1169
- Sadana, D.K.¹ Norcott, M.H.² Wilson, R.G.³ Dahmen, U.⁴

36
- 0022669004
- O. W. Holland, J. Narayan, D. Fathey, and S. R. Wilson, Appl. Phys. Lett. 59, 905 (1986).
- (1986) Appl. Phys. Lett. , vol.59 , pp. 905
- Holland, O.W.¹ Narayan, J.² Fathey, D.³ Wilson, S.R.⁴

37
- 0040153542
- P. Omling, E. R. Weber, L. Montelius, H. Alexander, and J. Michel, Phys. Rev. B 32, 6571 (1985).
- (1985) Phys. Rev. B , vol.32 , pp. 6571
- Omling, P.¹ Weber, E.R.² Montelius, L.³ Alexander, H.⁴ Michel, J.⁵

38
- 0345948698
- Y. Tokuda, N. Kobayashi, A. Usami, Y. Inoue, and M. Imura, J. Appl. Phys. 66, 3651 (1989).
- (1989) J. Appl. Phys. , vol.66 , pp. 3651
- Tokuda, Y.¹ Kobayashi, N.² Usami, A.³ Inoue, Y.⁴ Imura, M.⁵

39
- 0033330769
- T. Okino and T. Shimozaki, Physica B 273, 509 (1999).
- (1999) Physica B , vol.273 , pp. 509
- Okino, T.¹ Shimozaki, T.²

40
- 0000928030
- S. K. Estricher, J. L. Hastings, and P. A. Fedders, Appl. Phys. Lett. 70, 432 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 432
- Estricher, S.K.¹ Hastings, J.L.² Fedders, P.A.³

41
- 0028767890
- D. A. Redman, D. M. Follstaedt, T. R. Guilinger, and M. J. Kelly, Appl. Phys. Lett. 65, 2386 (1994).
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2386
- Redman, D.A.¹ Follstaedt, D.M.² Guilinger, T.R.³ Kelly, M.J.⁴

42
- 0029273786
- R. Siegel, G. C. Weatherly, H. K. Haugen, D. J. Dickwood, and L. M. Howe, Appl. Phys. Lett. 66, 1319 (1995).
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1319
- Siegel, R.¹ Weatherly, G.C.² Haugen, H.K.³ Dickwood, D.J.⁴ Howe, L.M.⁵

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