Sputtered yttrium oxide thin films appropriate for electrochemical sensors

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 229-234

  Ivanic, R ^a   Rehacek, V ^a   Novotny, I ^a   Breternitz, V ^b   Spiess, L ^b   Knedlik, Ch ^b   Tvarozek, V ^a  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Microelectrochemical cell; Redox recycling; Sputtering; Yttrium oxide thin film

Indexed keywords

CHEMICAL SENSORS; ELECTROCHEMISTRY; OXIDES; REDOX REACTIONS; SPUTTERING; THIN FILMS; YTTRIUM COMPOUNDS;

ELECTROCHEMICAL SENSORS;

THIN FILM DEVICES;

EID: 0035858609     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00117-8     Document Type: Conference Paper

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