In situ spectroscopic ellipsometry in vertical furnace: Monitoring and control of high-temperature processes

Vacuum

Volumn 61, Issue 2-4, 2001, Pages 427-434

  Petrik, P ^a   Schneider, C ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b Fraunhofer Inst fuer Integrierte   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; HEATING FURNACES; HIGH TEMPERATURE OPERATIONS; PROCESS CONTROL;

SPECTROSCOPIC ELLIPSOMETRY;

VACUUM TECHNOLOGY;

EID: 0035858502     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00139-7     Document Type: Conference Paper

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