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Volumn 117, Issue 6, 2001, Pages 383-386
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Patterned structures of silicon nanocrystals prepared by laser annealing
a
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Author keywords
A. Semiconductors; D. Phase transitions; E. Luminescence
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Indexed keywords
AMMONIA;
ANNEALING;
CRYSTALLIZATION;
DIFFRACTION GRATINGS;
EXCIMER LASERS;
PHASE TRANSITIONS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SANDWICH STRUCTURES;
SILANES;
LASER ANNEALING;
LASER INTENSITY;
NANOSTRUCTURED MATERIALS;
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EID: 0035846870
PISSN: 00381098
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1098(00)00463-4 Document Type: Article |
Times cited : (7)
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References (8)
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