Surface hydrogenation as a method to purify and flatten a silicon surface

Applied Physics Letters

Volumn 78, Issue 24, 2001, Pages 3839-3841

  Higai, Shin'ichi ^a   Ohno, Takahisa ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035844371     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1377314     Document Type: Article

References (18)

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