In situ infrared fibre evanescent wave spectroscopy as a diagnostic tool for plasma polymerization in a gas discharge

Journal of Physics D: Applied Physics

Volumn 34, Issue 9, 2001, Pages 1318-1325

  Li, K ^a   Meichsner, J ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; MOLECULAR ORIENTATION; MOLECULAR STRUCTURE; PLASMA ETCHING; PLASMA POLYMERIZATION; PLASTIC FILMS; POLYSTYRENES; THIN FILMS;

GAS DISCHARGE PLASMA; PLASMA POLYMER FILMS;

PLASMA DIAGNOSTICS;

EID: 0035820754     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/34/9/306     Document Type: Article

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