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Volumn 105, Issue 13, 2001, Pages 2572-2577

Plasmachemical dehydroxylation of high surface area silica at room temperature

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL EMISSION SPECTROSCOPY; PLASMACHEMICAL DEHYDROXYLATION; ROOM TEMPERATURE; SILANE COUPLING REACTION;

EID: 0035810498     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp003250a     Document Type: Article
Times cited : (6)

References (50)
  • 33
    • 33645920505 scopus 로고    scopus 로고
    • U.S. Patent 5 798 261
    • Koontz, S. L. U.S. Patent 5 798 261, 1998.
    • (1998)
    • Koontz, S.L.1
  • 45
    • 33645908354 scopus 로고
    • Manos, D. M., Flamm D. L., Eds.; Academic Press: London, Chapter 2
    • Flamm, D. L. In Plasma Etching, An Introduction; Manos, D. M., Flamm D. L., Eds.; Academic Press: London, 1989; Chapter 2.
    • (1989) Plasma Etching, An Introduction
    • Flamm, D.L.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.